IG20

A 5keV Argon or Oxygen ion source for UHV surface analysis applications

  • Model: IG20
  • Manufacturer: Hiden Analytical

The IG20 features a high brightness electron impact gas ion source which is designed specifically for oxygen capability but is also suitable for use with inert and other gases.

Features:

  • 100Micron Spot Size
  • HighCurrent Density
  • OxygenCompatible
  • NeutralDump
  • Scanning
  • EasilyReplaceable Twin Filaments
  • DN35 Conflat Flange Mounting

Applications

  • Thin Films Optical Coating
  • Electronic Materials
  • Nuclear Materials
Category:

A high-brightness gas source ion gun for application to SIMS, Auger and XPS Depth Profiling and Surface Physics

The electron impact ion source is specifically designed for oxygen compatibility, in addition to working with inert gas, and continuous operation is achieved  concurrently with high current density. The geometrically well-defined homogenous ion beam enables precise control of beam focus and beam positioning, producing a well-defined spot with high brightness.

The gun features full PC control and includes target current amplifiers with line and raster scan generators. Settings may be saved recalled from file for instant and reproducible setup and switching between beam conditions (such as fine focus imaging and high current cleaning).

The 3° column bend and neutral dump ensure optimum rejection of neutrals.

The fast response beam steering module attaches directly to the ion gun giving sweep rates to 64 µseconds, and when used in conjunction with the Hiden SIM EQS or MAXIM SIMS probes the raster rate and raster area may be directly defined through the probe control program.

Ion Gun

Ion Beam
Energy 0.5 to 5.0 keV
Spot diameter 50 µm – imaging,

100 µm – depth profiling

Current 0.1 to 800 nA
Typical fast etch rate – Si (5 keV Ar 600 nA) 50 nm min-1 (450 µm x 650 µm crater) 
Species Oxygen or inert gases
Deflection Field +/- 4 mm
Ion Source
Type Electron Impact Twin Filament
Electron Emission 0 to 30 mA
Electron Energy 0 to 100 volts
Ion Column
Condenser 3 element lens
Objective 3 element lens
Alignment Independent X and Y alignment plates
Deflection Independent X and Y deflection plates
Fast Neutral Dump 3 degree bend in the ion column
Beam blanking Single deflector plate
Mounting
Port DN-35-CF (2.75″ OD) Conflat type
Port Clearance 35 mm minimum internal diameter
Column Tip to Mounting Flange Distance (optional mechanical adjuster fitted) 242 mm
Column Tip to Sample Working Distance 20 to 80 mm
Differential Pumping
Recommended Pump 50 l/s or higher turbomolecular pump. Suitable for oxygen working if applicable
Mounting flange DN-63-CF (4.5″ OD) Conflat type
Bakeout
Maximum Recommended Temperature 250°C

Ion Gun Control

Control  system PC based running Windows® XP™ with connection via Ethernet, LAN, RS232 or USB.
Deflection Amplifiers
Minimum Sweep Time 64 µs
Flyback Time 15 µs
Beam Blanking
Rise Time 3 µs
Fall Time 3 µs
Displays
PC based control Filament selection, Ion Energy, Emission Current, Electron Energy, Condenser Lens, Objective Lens, Upper X-Align, Upper Y-Align, X-Deflection,

Y-Deflection, X-Scan Amplitude, Y Scan Amplitude.

Diagnostics / measurement Built in diagnostic linescan scan (X and Y), including supplies for electron suppressed beam current measurement and spot shape, (incorporated electrometer displays beam current profile on PC via PC oscilloscope).

A simple line flyback raster generator is also included. Readback of steering voltages and emission current.

Controls Keyboard and mouse control of all beam steering plates, scan amplitudes, offsets and lenses with settings saved to PC for future recall.
External inputs The control unit accepts an external scan input. Separate X and Y gain controls are provided to optimise amplification of the scan signal. External target bias input (max 350V) is switched via the beam diagnostics control.
Power  Requirements 240/220 VAC, 120/110 VAC, 50/60 Hz, 0.25 kVa 
Dimensions
Control Unit 311 mm (12.25″) height, 343 mm (13.5″) deep, 19″ Rack Mounting.
Beam steering module Mounts directly to the ion gun

63 mm (2.5″) x 127 mm (5.0″) x 368 mm (14.5″) length

Hiden SIMS | Analytical Secondary Ion Mass Spectrometry Products

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