IG20

A high-brightness gas source ion gun for application to SIMS, Auger and XPS Depth Profiling and Surface Physics

The electron impact ion source is specifically designed for oxygen compatibility, in addition to working with inert gas, and continuous operation is achieved  concurrently with high current density. The geometrically well-defined homogenous ion beam enables precise control of beam focus and beam positioning, producing a well-defined spot with high brightness.

The gun features full PC control and includes target current amplifiers with line and raster scan generators. Settings may be saved recalled from file for instant and reproducible setup and switching between beam conditions (such as fine focus imaging and high current cleaning).

The 3° column bend and neutral dump ensure optimum rejection of neutrals.

The fast response beam steering module attaches directly to the ion gun giving sweep rates to 64 µseconds, and when used in conjunction with the Hiden SIM EQS or MAXIM SIMS probes the raster rate and raster area may be directly defined through the probe control program.