A quadrupole mass spectrometer for process monitoring and vacuum diagnostics

  • Model: HMT RC
  • Manufacturer: Hiden Analytical

The Hiden HMT RC system is designed for vacuum process monitoring applications including process gas trend analysis, leak detection, and vacuum survey.


  • Residual gas analysis
  • Vacuum processing
  • Near atmospheric XPS, APXPS
  • Thin film optical coating

The quadrupole analyser is a precision assembly including a mass filter with machined radial ceramic supports, an electron impact ioniser with twin ox ide coated iridium filaments and a choice of either Faraday only or dual Faraday and Channelplate electron multiplier detectos. The analyser mounting flange is a DN-35-CF (2¾”, 70 mm OD) Conflat type flange. Mass range is 100 amu. 

The HMT RC is uniquely dual mode. The instrument enables the user to select one mode for analysis at process pressures up to 5 x 10-3 mbar, and to switch to standard RGA mode for analysis at process chamber base pressure down to 2 x 10-13 mbar for vacuum diagnostics. The system is delivered factory calibrated for two user specified process pressures, operation in argon process at 2 x 10-3 mbar and 5 x 10-3 mbar is standard, and for operation at high vacuum.

The Hiden HMT RC system is directly controlled from a PC compatible computer via USB RS232 or Ethernet link, providing simultaneous data acquisition from multiple systems. There is no limit to the number of HMT systems that can be connected to one PC, assisting the process control environment. The RC interface unit is a 90 mm high (2U), 19 inch rack mounting unit.  It is mains powered and includes power on and filament status indicators.

Windows®-MASsoft Professional PC software provides for fast data acquisition through either user configured acquisition files or pre-set modes selected by icon.


  • Dual process pressure and high vacuum RGA modes for analysis at process pressure and at high vacuum without the requirement for differential pumping.
  • Fastaccess for Histogram, Trend Analysis and Analog peak displays
  • Mixedmode scanning. Trend Analysis, Histogram and Analog peaks in a multi-window display for exam
  • Realtime background subtract.
  • Simultaneousreal time display of graphical and tabular trend analysis dat
  • Dataacquisition from multiple systems via Ethernet.
  • Automaticmass scale alignment.
  • Integralmass spectral library with full editing facilit
  • Dataexport facility to ASCII format and to all Windows® devices for printing/plott
  • Cursorfor peak height identification under mouse control.


Mass Range: 100 amu
Maximum  Operating  Pressure: 5 x 10-3 mbar.
Resolution: 10% Valley between adjacent peaks of equal height throughout the mass range.

Software adjustable.

Detector: Faraday cup or dual Faraday Electron Multiplier detector
Minimum Detectable Partial Pressure: 2 x 10-11 mbar in RGA mode.

2 x 10-13 mbar with Channelplate detector 5 5x 10-8  mbar in Process pressure mode.

Measurement speed
Maximum measurement speed: 650 measurements per second.
Ion Source: Electron bombardment type, radially symmetric.
Filament: Twin filament.

Oxide coated iridium is standard.

Sensitivity  control: Peak height sensitivity factor adjustable in the range
Analyser mounting flange: DN-35-CF (2¾”/70 mm O.D. Conflat-type).
Analyser insertion length from mounting flange face: HMT 100-RC : 138 mm 

HMT 101-RC : 155 mm

RF head dimensions: Height    – 117 mm, Width – 104 mm, Depth – 195 mm

Depth is distance from vacuum face of analyser mounting flange.

RC interface unit dimensions: Height:  90 mm/2U. Width: 19″ rack mounting. Depth: 240 mm 
Cable lengths
RC interface to RF head: 3 m standard.

Longer lengths to 40 m available

RC interface to PC: Up to 15 m with RS232 link.

Up to 750 m with unbridged Ethernet link.

5 m Ethernet and 5 m RS232 cables included.

PC Software: MASsoft  Professional
Communications to PC: RS232, USB 2.0, 10/100 Base-T LAN
RC interface unit I/O: 5 configurable I/O TTL lines, 2 analogue inputs, 2 trip relay outputs, external trip input and over-pressure trip output.

3 RS485 (multi protocol) to interface with a wide range of external devices, MFCs for example.

8 digital inputs compatible with 5 V and 24 V logic levels. 8 open collector digital outputs (30 V, 500 mA max)

4 or 8 channel analogue outputs, 0-10 V, 14 bit (optional).

Power   requirement: 100-240V AC, 50-60 Hz, 250 VA.

Mass Spectrometers for Residual Gas Analysis – RGA | For Applications in a Vacuum Environment


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