SIMS Workstation

Secondary in mass spectrometry (SIMS) is one of the most sensitive surface analysis techniques with detection limit of many elements up to ppb content with the ability to detect all elements and isotopes. The sample is bombarded by an ion beam under ultra-high vacuum (UHV) and the sputtered material, surface characteristics are analyzed by highly sensitive mass spectrometry. Consequently, SIMS instruments are routinely used to analyze ceramics, organic material, polymers, semiconductors, and more.

Product overview

Hiden’s SIMS system features a gas ion pump gun for Oxygen and Argon bombardment during ion secondary mass spectrometry (SIMS and sputtered neutral mass spectrometry) (SNMS), and a pump gun Cesium is sensitive to negative ions. Both primary ion pump guns are controlled by an intuitive computer interface, allowing the ion beam shape and intensity to be observed during control. Parameters can be saved and retrieved for quick tool reinstallation. Hiden offers options according to specific research needs or process monitoring requirements, ensuring maximum performance, tailored to the user’s application.

Hide Analytical’s SIMS Workstation uses to analyze both static and dynamic SIMS, with dual-mode MAXIM mass spectrometry, this instrument can operate in secondary ion detection mode for +ve/-ve ion detection and in a secondary neutral detection mode for +ve data quantification.

SIMS imaging is also a powerful device tool. A camera allows for precise positioning. Simultaneously, SIMS spectra are easily obtained using MASoft software to control all analysis parameters, recovery, valve operation, mass, and acquisition rate through a line graph interface.

Features of secondary ion mass spectrometer – SIMS

• Using MAXIM SIMS analyzer operating under MASsoft Professional for ppb analysis
• Integrate ionizer for efficient SNMS analysis
• Choice of differentially pumped primary excitation sources
• IG20 Gas, IG5C Caesim, IFG200 FAB or high performance liquid gallium guns
• Integral ion gun raster control with signal gating for depth profiling
• Electron flood gun option for charge neutralization in insulator studies
• UHV manipulator for optimum sample positioning
• SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program
• Static SIMS spectral Library available
• Automatic SIMS ion optics lens tuning
• Automatic mass alignment for optimum SIMS performance

Conclude

• Address: Room 202B, Building A, Software Technology Park, Vo Truong Toan Street, Vietnam National University, Ho Chi Minh City, Quarter 6, Linh Trung Ward, Thu Duc City, Ho Chi Minh City, Vietnam Male
• Email: info@reecotech.com.vn
• Hotline: 0938 696 131 (Sales Department) / 0901 880 386 (Technical Service Department)