HPR-30 RGA Cart

The Hiden HPR-30 RGA Cart is a quadrupole mass spectrometer system designed for stable and accurate real time process gas and contaminant monitoring of vacuum processes. A dual conductance sampling inlet provides for process chamber leak detection, for high sensitivity analysis of gases and vapours including water vapour, and for the analysis of hydrocarbons. This enables high sensitivity gas analysis during vacuum processing and high sensitivity residual gas analysis when the chamber is at base pressure below 10-4 mbar.

Process gases are drawn directly to the quadrupole ioniser by a sampling orifice probe which may be extended directly to the process region, optimising response and sensitivity to the process gas.

The comprehensive data acquisition package includes real time trend analysis of multiple gas and vapour species levels and includes on-board alarms to notify the user of any out of limit condition.

The standard system with 200 amu mass range has a detection capability to less than 100 parts-per-billion. The optional 3F Series, 300 amu mass range system with triple-stage mass filter offers extended detection levels to 10 parts-per-billion together with enhanced contamination resistance and is recommended for applications requiring optimum abundance sensitivity. Extended mass range options with mass range to 510 amu and 1000 amu are offered for advanced applications.

The system is directly PC controlled with Windows® MASsoft Professional PC software for extensive data acquisition and display modes.

The HPR-30 RGA cart system is mounted on a compact cart that includes an adjustable height support to enable the RGA system to be moved between multiple process chambers within a facility.

The height adjustment is straightforward and enables the sampling point to be connected to the vacuum process chamber from 821 mm up to 1476 mm giving a high degree of mounting flexibility.

Custom configurations are available to accommodate alternative mounting requirements.

The UHV sampling head is terminated with a DN-35-CF conflat type flange for UHV compatibility, and is typically used with an adaptor flange, type KF 40 for example, for connection to the process chamber.