HMT

The quadrupole analyser is a precision assembly including a mass filter with machined radial ceramic supports, an electron impact ioniser with twin ox ide coated iridium filaments and a choice of either Faraday only or dual Faraday and Channelplate electron multiplier detectos. The analyser mounting flange is a DN-35-CF (2¾”, 70 mm OD) Conflat type flange. Mass range is 100 amu. 

The HMT RC is uniquely dual mode. The instrument enables the user to select one mode for analysis at process pressures up to 5 x 10-3 mbar, and to switch to standard RGA mode for analysis at process chamber base pressure down to 2 x 10-13 mbar for vacuum diagnostics. The system is delivered factory calibrated for two user specified process pressures, operation in argon process at 2 x 10-3 mbar and 5 x 10-3 mbar is standard, and for operation at high vacuum.

The Hiden HMT RC system is directly controlled from a PC compatible computer via USB RS232 or Ethernet link, providing simultaneous data acquisition from multiple systems. There is no limit to the number of HMT systems that can be connected to one PC, assisting the process control environment. The RC interface unit is a 90 mm high (2U), 19 inch rack mounting unit.  It is mains powered and includes power on and filament status indicators.

Windows®-MASsoft Professional PC software provides for fast data acquisition through either user configured acquisition files or pre-set modes selected by icon.

Features

• Dual process pressure and high vacuum RGA modes for analysis at process pressure and at high vacuum without the requirement for differential pumping.
• Fastaccess for Histogram, Trend Analysis and Analog peak displays
• Mixedmode scanning. Trend Analysis, Histogram and Analog peaks in a multi-window display for exam
• Realtime background subtract.
• Simultaneousreal time display of graphical and tabular trend analysis dat
• Dataacquisition from multiple systems via Ethernet.
• Automaticmass scale alignment.
• Integralmass spectral library with full editing facilit
• Dataexport facility to ASCII format and to all Windows® devices for printing/plott
• Cursorfor peak height identification under mouse control.