HALO 201 MBE

A gas analysis system for molecular beam epitaxy applications

  • Model: HALO 201 MBE
  • Manufacturer: Hiden Analytical

The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.

Applications

  • Semiconductor production
  • Fuel cells
Category:

The Hiden HALO RGA is designed for RGA, leak detection, trend analysis and vacuum survey in demanding MBE environments. The HALO 201 MBE features a contamination resistant ion source screen and molybdenum wiring in place of standard copper wiring.

The HALO quadrupole analyser is a precision assembly including a mass filter with machined radial ceramic supports, an electron impact ioniser with twin oxide coated iridium filament and Faraday and Channelplate electron multiplier detector. The analyser mounting flange is a DN-35-CF (2¾”, 70 mm OD) Conflat type flange. Mass range is 200 amu.

The HALO 201 MBE RGA is directly controlled from a PC compatible computer via USB, RS232 or Ethernet link, providing simultaneous data acquisition from multiple systems. The RC interface unit is a 90 mm high (2U), 19 inch rack mounting unit.  It is mains powered and includes power on and filament status indicators.

Windows® MASsoft Professional PC software provides for fast data acquisition through either user configured acquisition files or pre-set modes selected by icon.

Hiden manufacture a broad range of quadrupole mass spectrometers addressing a wide application range. Further RGA instruments are detailed in the Hiden RGA series specification.

The Hiden HALO 201 MBE  system includes

  • RCcontrol interface unit.
  • RFgenerator with preamplifier.
  • Analyserwith integral electron bombardment ion source, precision mass filter ion source screen, molybdenum gauge wiring and dual Faraday/SEM channelplate detector.
  • Connecting
  • MASsoftProfessional- PC Software

The system requires a PC for operation, not included in this item.

HALO 201 MBE standard features

  • Integralion source screen to maintain long life and minimise contamination
  • Vacuumgauge wiring- 
  • Leakdetection mode with helium or other user selectable search 
  • Fastaccess for, Histogram, Trend analysis and Analog peak 
  • Realtime background subtract.
  • New Vacuum species identification with automated analy
  • Simultaneousreal time display of graphical and tabular trend analysis dat
  • Dataacquisition from multiple systems via Ethernet.
  • Automaticmass scale alignment.
  • Integralmass spectral library with full editing facilit

Data export facility to ASCII format and to all Windows® devices for printing/plotting.

Mass Range: 200 amu
Maximum Operating Pressure: 1 x 10-4 mbar with Faraday detector.
Resolution: 10% Valley between adjacent peaks of equal height throughout the mass range. Software adjustable.
Detector: Twin detector :

Faraday cup and Channelplate electron multiplier.

Minimum Detectable Partial Pressure 1 x 10-11 mbar with Faraday detector

2 x 10-13 mbar with Channelplate detector

Measurement speed:
Maximum measurement speed: 650 measurements per second.
Ion Source: Radially symmetric, UHV compatible ion source. Integral ion source screen
Filament: Twin filament.

Oxide coated iridium is standard.

Ion Source control option:
Electron emission Software variable 1 µA to 2 mA.
Electron energy: Software variable 0 to 150 eV
Ion energy: Software variable 0 to 10 eV 
PC Software: MASsoft  Professional
Communications to PC: RS232, USB 2.0, 10/100 Base-T LAN
RC interface unit I/O 5 configurable I/O TTL lines, 2 analog inputs, 2 trip relay outputs, external trip input and over-pressure trip output.

3 RS485 (multi protocol) to interface with a wide range of external devices, MFCs for example.

8 digital inputs compatible with 5 V and 24 V logic levels. 8 open collector digital outputs (30 V, 500 mA max)

4 or 8 channel analog outputs, 0-10 V, 14 bit (optional).

Power   requirement: 100-240V AC, 50-60 Hz, 250 VA.

Mass Spectrometers for Residual Gas Analysis – RGA | For Applications in a Vacuum Environment

Download

Product reviews

Review HALO 201 MBE

5 0% | 0 review
4 0% | 0 review
3 0% | 0 review
2 0% | 0 review
1 0% | 0 review
Review HALO 201 MBE
Choose a image
0 character ( Minimum of 10)
    +

    There are no reviews yet.

    No comments yet

    Related products

    airmoMEDOR

    AirmoMEDOR automated gas chromatography device for analyzing and monitoring odorous sulfur compounds

    Quantification of trace amounts of odorous sulfur compounds at ppm, ppb, and ppt levels
    Find out more
    chromaS

    Automated Sulfur Compounds Analyzer – Chroma S

    Automated online analysis & monitoring of sulfur compounds: H₂S / COS / CS₂ / SO₂ / RSH
    Find out more
    Auto GCMS C10C40

    Auto GC‑MS C10C40

    Portable Ultra‑Compact GC‑MS/FID Trap System
    Find out more
    MicroVOC

    Mobile VOC Analyzer – microVOC/microBTEX

    Real-time identification and quantification of volatile organic compounds (VOCs) with high precision
    Find out more
    Hệ thống giám sát Ozone airmOzone

    airmOzone Ozone Monitoring System

    A Comprehensive Solution for Monitoring Ozone Precursors (PAMS 56) and Toxics
    Find out more
    Thiết bị phân tích hợp chất hữu cơ airmoVOC C6-C20

    AirmoVOC C6-C20 Organic Compound Analyzer

    Measurement of volatile organic compounds (VOCs) and semi-volatile organic compounds (SVOCs) in ambient air.
    Find out more
    chromaPID

    BTEX Analyzer Using ChromaPID PID Sensor

    Analyzes and monitors volatile organic compounds (VOCs) and other related substances in air, water, or soil
    Find out more
    ChromaFID

    ChromaFID Volatile Organic Compound (VOC) Analysis System

    GC/FID for Automatic, Continuous Analysis of VOCs (from 20 ppb to ppm)
    Find out more

    Subscribe to Content

    If you need to copy the content, please leave your information, and we will respond as soon as possible. Sincerely, thank you!