HPR-60 MBMS

Radicals are sampled via a multistage differentially pumped skimmer inlet and transferred to the MS ion source with minimal interaction with other species and without wall collisions. Customisable inlets allow connection to many different reactor systems, including atmospheric plasmas.

The skimmer system, combined with a Hiden triple filter precision mass spectrometer, offers a sampling system with ultra fast response and high accuracy.

The Hiden HPR-60 MBMS system is a system tailored to the analysis of reactive gas and plasma generated species for a wide variety of research applications.

The HPR-60 can be equipped with a choice of Hiden’s high performance quadrupole mass spectrometers. As standard, the Hiden EPIC series offers capability to analyse neutrals, radicals and ions from reactive gas species. This can be upgraded to the EQP series, which offers enhancements in sensitivity and ion energy analyses.

System mass range can be tailored to the application requirement, a variety of mass ranges are offered depending on mass spectrometer selection:

EPIC/ EQP-6 – 300,510 amu.

EPIC 1000/ EQP-9 – 50, 300, 510, 1000, 2500, 5000 amu.

EQP-20 – 20/200 amu.

Energy range is 100 eV as standard, 1000 eV is optional.

System features:

• +ve and -ve ion analysis.
• Appearance potential spectra for radical’s analysis.
• Electron attachment ionisation (EAMS) mode option for analysis of electronegative radicals.
• Front stage heating option to 1000 °C.
• Programmable signal gating option for pulsed plasma studies.
• Molecular beam chopper option for automated beam foreground-background measurement.
• Windows® MASsoft Professional PC software with RS232, USB and Ethernet communication links.

The HPR-60 inlet system is configured to interface with the desired pressure regime, as well as experimental conditions. Pressure reduction stages with differential pumping and replaceable skimmer cones allow the system to sample in pressure ranges from atmospheric pressure to 5 bar. The combination of high conductance ‘low-z’ manifolds and tailored skimmer cones enable direct sampling via axially aligned orifices for minimum disturbance of ion and radical species. The modular construction provides a flexible sampling arrangement with future upgrade capability.

An optional sample inlet heater interface is configured to maintain sample temperature up to 1000°C from reactor to sampling orifice.

The HPR-60 system includes a manually controlled beam stop for sample beam-to-background measurement. An integrated molecular beam chopper is available as a system option for automated simultaneous acquisition of foreground/background data, enabling real time display of molecular beam signal with instantaneous beam background subtraction.