MAXIM

A system for static and dynamic SIMS and SNMS applications

  • Model: MAXIM
  • Manufacturer: Hiden Analytical

FOR SURFACE ANALYSIS

The Hiden MAXIM quadruple SIMS analyser is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications.

The MAXIM analyser system includes an integral energy filter for ion acceptance at 30° to the probe axis, high transmission SIMS extraction optics, triple mass filter, pulse ion counting detector and control electronics.

Applications

  • Surgical Stent
  • Flexible Solar Cell
Category:

The Hiden MAXIM SIMS analyser is a state of the art triple filter secondary ion mass spectrometer for static and dynamic SIMS and SNMS applications.

The MAXIM analyser system includes an integral energy filter for ion acceptance at 30o to the probe axis, high transmission SIMS extraction ion optics, triple mass filter, pulse ion counting detector, and control electronics with Windows® compatible MASsoft Professional PC software.

MAXIM has a sensitivity of greater than 3 million counts per nano amp of primary beam current when monitoring the aluminium atomic ion emitted from an aluminium target bombarded by a 5keV Argon primary beam and a useful yield for boron in silicon in excess of 0.02% when bombarded with oxygen at 5 keV.

The analyser includes a front end mounted electron impact ion source that provides for a high sensitivity secondary neutral mass spectrometry for quantitative analysis of metallurgical thin films, alloys and dielectric materials.

The MAXIM SIMS analysers are supplied fully assembled on a DN-100-CF (6″ OD) Conflat type mounting flange. A UHV standard vacuum gauge with pressure sensing relay interlock is required for mass spectrometer protection. A UHV total pressure gauge is offered on request as an optional accessory.

Hiden MAXIM probes are directly PC controlled, Windows® MASsoft Professional PC software is included as standard and provides comprehensive data acquisition and presentation routines.

Standard system features

  • Positiveand negative ion analy
  • Hightransmission SIMS extraction ion opt
  • SNMSfor quantitative analysis at matrix 
  • Targetpotential output for optimum SIMS and SNMS efficiency.
  • Outputsfor raster control of the primary ion gun with user programmable gating to define optimum data acquisition in depth profiling applications.
  • Windows®-MASsoftProfessional PC software compatible with Ethernet, LAN, USB and RS232 c

 

Mass Range: 1:300 amu,  1:510 amu,  1:1000 amu
Resolution 5% valley between adjacent peaks of equal height throughout the mass range. 
Detector Ion Counting detector, positive and negative ion detection
Detection Range 1:107
Maximum count rate 107 counts per second
Minimum count rate 1 count per second

A TTL pulse output is available direct from the SIMS interface

Sensitivity >3×106 c/s per nanoamp (Ar , 5keV primary ion beam, 20 mm working distance, 300 amu system)
Energy Filter Parallel plate, 30 degree off-axis acceptance
Target Potential output -350 V to 350 V continuous through zero (BNC output) 
Mass Filter 3 stages each of 4 poles

Pole diameter: 9.0 mm

Bakeout Temperature Maximum 250°C.
Vacuum Protection External trip for remote protection (max pressure 5×10-6 torr) 
Power Requirement 100 – 240 Vac, 50-60 Hz, 1 kVA.

Maximum voltage fluctuation –10% to +7%.

Dimensions:
Analyser mounting flange. DN-100-CF (6″ OD) Conflat type mounting flange.
Analyser length from mounting flange face 464 mm
RC7 SIMS Interface unit 19 inch rack mounting 7U (12.25 inch – 315 mm) high x 450 mm depth 
RC7 interface to PC Up to 15 m with RS232 link.

Up to 750 m with unbridged Ethernet link. Up to 3 m USB

5 m Ethernet and 5 m RS232 cables included

Hiden SIMS | Analytical Secondary Ion Mass Spectrometry Products

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