Mass spectrometers for advanced surface analysis applications

1. OVERVIEW

The characteristics and features of a solid surface depend on the chemical structure of the material’s surface. By using surface analysis equipment, it is possible to analyze the elemental composition and state of the solid surface.

The outermost part of the material is extremely sensitive, carrying surface properties such as the material’s chemical activity, adhesion, wettability, electrical properties, optical properties, corrosion resistance, friction and biocompatibility, and it is also the part that is most easily loses those properties due to environmental degradation and pollution, process residue adhesion, etc.

Therefore, surface analysis is not only used to develop new functional surfaces and products that use them, but also helps high-performance materials to perform their functions properly. For example, in the semiconductor manufacturing process, even a minimal amount of impurities or foreign matter adhesion on the surface can cause the product to fail to meet quality standards. In addition, when detecting contamination, the composition of the contaminant must be analyzed first to clarify the cause.

Hiden Analytical’s surface analysis systems are a comprehensive solution for in-depth profiling and composition analysis of samples in a wide range of fields: surface analysis, thin film technology, semiconductor industry, fuel cell research, etc. In addition, the system can provide options according to specific research needs or process monitoring requirements, ensuring maximum performance tailored to the user’s application (custom SIMS solutions).

phân tích bề mặt vật liệu

2. APPLICATION

  • Surface Analysis using SIMS and SNMS Techniques:Reecotech distributed SIMS secondary ion mass spectrometry provides high-performance static and dynamic SIMS analysis for surface composition analysis, contaminant analysis, and high-resolution depth profiling of sample surface layers.
  • Material Surface Analysis at the Nanoscale: Nano-scale materials analysis focuses on detecting trace and ultra-trace elements down to the ppm range. The Reecotech distributed focused ion beam secondary ion mass spectrometry (FIB-SIMS) system offers isotope and ion (atomic, molecular) detection, 3D elemental mapping, and lays the foundation for qualitative analysis of nanolayer composition.
  • Analysis of Silicone Contamination on Material Surfaces: Polydimethylsiloxane (PDMS) is used as a lubricant in cosmetics, food additive [E900] and a sealant very popular in the industry. However, PDMS can decompose into silicon dioxide (glass), forming an insulating layer in electronic devices and making it difficult to bond surfaces, it is also very difficult to remove. Hiden Analytical’s SIMS equipment can easily detect the presence of this important industrial contaminant.
  • Semiconductor – Electronics Materials Research: SIMS is critical for dopant analysis in semiconductor materials, applications in direct measurement of ion implantation dose and diffusion; measuring layer thickness, layer sharpness and alloy composition; and monitoring metallization, passivation and contamination processes.
  • Flexible solar cell: Hiden Analytical Secondary ion mass spectrometry SIMS analyzers multicomponent complex depth profiles collecting both matrix and dopant level elements in surface of Flexible solar cell
  • Isotopic Composition Determination in Materials: Hiden Analytical’s SIMS secondary ion mass spectrometer can identify the isotopic composition of materials, helping to analyze the diffusion of isotopes in layers.
  • Nuclear Materials Research: The ability to measure isotopes and analyze small particles allows SIMS secondary ion mass spectrometry to analyze research on nuclear materials.
  • Stent Surface Research: A stent is a small metal mesh coil that is placed in a blocked coronary artery and needs to be biocompatible with the body, so stent surface inspection is very important. Hiden Analytical’s mass spectrometers are used to analyze surface composition with nanometer accuracy. In addition, stents can be coated with a polymer layer for protection or for drug elution, SIMS can be used to study and characterize this polymer layer.
  • Depth Profiling and Quantitative Composition of Alloys by Sputtered Neutral Mass Spectrometry (SNMS): Hiden Analytical’s sputtered neutral mass spectrometer provides high-resolution quantitative depth data for analyzing the layer structure of materials and the active region of the material surface.
  • Applications in the Pharmaceutical Field: Hiden Analytical’s SIMS instrument can analyze drug powders by dispersing them on conductive adhesive tape, forming pellets, or pressing them into indium plates. In addition, this instrument can detect the presence of binders, fillers or excipients in drugs using low energy ion beams.

Xác định thành phần đồng vị trong vật liệu

System device

SIMS WORSTATION

SIMS Workstation

A UHV surface analysis system for thin film depth profiling
Find out more
Hệ thống phổ khối ion thứ cấp (SIMS)

AutoSIMS

Automatic Surface Analysis System
Find out more
Compact SIMS

Compact SIMS

Compact SIMS instrument optimised for depth profiling at the nanometer scale
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EQS SIMS Analyser

EQS SIMS Analyser

Bolt-on SIMS analyser for the analysis of secondary +ve and -ve ions from solid samples
Find out more
ToF-qSIMS Workstation

ToF-qSIMS Workstation

Innovative Time of Flight Quadrupole SIMS System
Find out more
Hệ thống máy phân tích khối phổ ion thứ cấp SIMS và SNMS tĩnh và động

MAXIM

A system for static and dynamic SIMS and SNMS applications
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Súng ion Caesium 5keV cho các ứng dụng phân tích bề mặt UHV

IG5C

A 5keV Caesium ion gun for UHV surface analysis applications
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Súng ion Argon hoặc Oxygen 5keV dành cho các ứng dụng phân tích bề mặt UHV

IG20

A 5keV Argon or Oxygen ion source for UHV surface analysis applications
Find out more

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