SIMS Workstation

A UHV surface analysis system for thin film depth profiling

  • Model: SIMS WORSTATION
  • Manufacturer: Hiden Analytical

SIMS Workstation is an extremely versatile and highly – sensitive instrument that uses secondary ion mass spectrometry (SIMS) in both dynamic and static SIMS. With an extended range and the ability to acquire and identify both positive (+ve) and negative (-ve) secondary ions, the SIMS workstation is a comprehensive solution for composition analysis and depth profiling applications of materials including polymers, superconductors, semiconductors, alloys, optical and functional coatings, and dielectrics.

Advantage:

  • Can detect all elements and their isotopes
  • High sensitivity, wide detection limit (detectable up to ppb)
  • Automatic mass alignment for optimal SIMS performance

Applications

  • SIMS Surface Analysis and SNMS Surface Analysis
  • Nuclear Materials
  • UHV Surface Science
  • Flexible Solar Cell
  • Electronic Materials
Category:

Secondary in mass spectrometry (SIMS) is one of the most sensitive surface analysis techniques with detection limit of many elements up to ppb content with the ability to detect all elements and isotopes. The sample is bombarded by an ion beam under ultra-high vacuum (UHV) and the sputtered material, surface characteristics are analyzed by highly sensitive mass spectrometry. Consequently, SIMS instruments are routinely used to analyze ceramics, organic material, polymers, semiconductors, and more.

phân tích ion

Product overview

Hiden’s SIMS system features a gas ion pump gun for Oxygen and Argon bombardment during ion secondary mass spectrometry (SIMS and sputtered neutral mass spectrometry) (SNMS), and a pump gun Cesium is sensitive to negative ions. Both primary ion pump guns are controlled by an intuitive computer interface, allowing the ion beam shape and intensity to be observed during control. Parameters can be saved and retrieved for quick tool reinstallation. Hiden offers options according to specific research needs or process monitoring requirements, ensuring maximum performance, tailored to the user’s application.

phân tích vật liệu

Hide Analytical’s SIMS Workstation uses to analyze both static and dynamic SIMS, with dual-mode MAXIM mass spectrometry, this instrument can operate in secondary ion detection mode for +ve/-ve ion detection and in a secondary neutral detection mode for +ve data quantification.

máy quang phổ

máy phân tích ion

SIMS imaging is also a powerful device tool. A camera allows for precise positioning. Simultaneously, SIMS spectra are easily obtained using MASoft software to control all analysis parameters, recovery, valve operation, mass, and acquisition rate through a line graph interface.

Features of secondary ion mass spectrometer – SIMS

  • Using MAXIM SIMS analyzer operating under MASsoft Professional for ppb analysis
  • Integrate ionizer for efficient SNMS analysis
  • Choice of differentially pumped primary excitation sources
  • IG20 Gas, IG5C Caesim, IFG200 FAB or high performance liquid gallium guns
  • Integral ion gun raster control with signal gating for depth profiling
  • Electron flood gun option for charge neutralization in insulator studies
  • UHV manipulator for optimum sample positioning
  • SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program
  • Static SIMS spectral Library available
  • Automatic SIMS ion optics lens tuning
  • Automatic mass alignment for optimum SIMS performance

Conclude

For more detailed information, advice and consultation on problems and solutions of mass spectrometry in the fields, please contact the information below:
REECO Science and Technology Co., Ltd
  • Address: Room 202B, Building A, Software Technology Park, Vo Truong Toan Street, Vietnam National University, Ho Chi Minh City, Quarter 6, Linh Trung Ward, Thu Duc City, Ho Chi Minh City, Vietnam Male
  • Email: info@reecotech.com.vn
  • Hotline: 0938 696 131 (Sales Department) / 0901 880 386 (Technical Service Department)
Mass range 510 amu standard.
  300 amu and 1000 amu mass range optional
Resolution 5% valley between adjacent peaks of equal height throughout the mass range
Detector Ion Counting detector, positive and negative ion detection, 4 kV post acceleration for positive ions.
Detection range 1 – 1017
Maximum count rate 1017 counts per second
Minimum count rate 1 counts per second
Sensitivity > 3 x 106 c/s per nanoamp (5 keV Ar, primary ion detecting Al+ from Al target at 20 mm working distance, 300 amu system)
Energy Filter Parallel plate

30o off axis injection

Ion Source Integral SNMS ion source

Electron impact 4  150 eV

Mass Filter 3 stages each of 4 poles.
Pole diameter: 9 – 1000mm
Series high-performance system Bake out Temperature 250oC

SIMS Workstation – Analytical Secondary Ion Mass Spectrometry

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Hiden SIMS | Analytical Secondary Ion Mass Spectrometry Products

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