Mass Spectrometers for Plasma Engineering

(Made by Hiden Analytical Ltd., UK) The EQP system is a combined mass spectrometer and energy analyser for the analysis plasma ions, neutrals and neutral radicals. The EQP instrument includes operating modes for positive ion, and negative ion analysis. Threshold ionization and electron attachment ionization modes are available for detailed …

(Made by Hiden Analytical Ltd., UK.  website: http://www.hidenanalytical.com) ESPION from Hiden Analytical is the world’s fastest, most versatile commercial electrostatic Langmuir probe. Critical plasma parameters such as: • Ion & electron density • Electron temperature distribution • Plasma uniformity are automatically measured and reported, providing rapid and accurate feedback essential …

(Made by  Hiden Analytical Ltd., UK) The HPR-30 sampling system configuration is for fast response high sensitivity analysis of gas and vapour species in vacuum processes.It is also directly suited to analysis of high mass species and precursors used in ALD and MOCVD applications. The HPR-30 system features a close-coupled …

                                                                 (Made by Hiden Analytical Ltd., UK) The Hiden HPR-60 molecular beam mass spectrometer is a compact skimmer inlet …