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Made by Hiden Analytical Ltd., UK. (website: http://www.hidenanalytical.com)
The SIMS Workstation is a family of instruments based around a large multi-function UHV chamber. The instrument is designed to be flexible, both in terms of function and cost, so features can be addedor upgrades made as required. However, as a guide there are three standard configurations:
+ Foundation SIMS Workstation
+ SIMS Workstation
+ SIMS WorkstationPlus
The Foundation SIMS Workstation has the main chamber and IG20 argon/oxygen source together with the 9 mm MAXIM spectrometer, a simple manipulator and an electron gun for charge compensation. This can be expanded with the addition of a full X-Y manipulator and load lock to create the standard SIMS Workstation. The SIMS WorkstationPlus is the fully featured instrument with the IG5C caesium ion
gun, liquid nitrogen cold trap and oxygen flood. It is, of course, possible to specify other options on all of the instruments. The Workstation chamber is specifically designed to allow access through the top port for an XPS spectrometer and a port on the front of the chamber is optimised for a non-monochromated x-ray source.
The Hiden SIMS components are available separately to enable SIMS to be added to an existing tool or to other instrumentation. A particularly useful customisation is the Modular SIMS where an ion gun, spectrometer, electron gun and light/camera are mounted on a single DN150 or larger flange.