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(Made by Hiden Analytical Ltd., UK. http://www.hidenanalytical.com)
The Hiden MAXIM quadruple SIMS analyser is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications.
The MAXIM analyser system includes an integral energy filter for ion acceptance at 30° to the probe axis, high transmission SIMS extraction optics, triple mass filter, pulse ion counting detector and control electronics.
- Technical Data
|Mass range||300 amu, 500 amu or 1000 amu|
|Detector|| Ion counting detector
Positive and Negative ion detection
Max count rate 107 cps
|Mass filter||Triple filter|
|Ion energy filter||30o|
|Ioniser|| Electron bombardment, single
filament for SNMS and RGA