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(Made by Hiden Analytical Ltd., UK)
The EQP system is a combined mass spectrometer and energy analyser for the analysis plasma ions, neutrals and neutral radicals. The EQP instrument includes operating modes for positive ion, and negative ion analysis. Threshold ionization and electron attachment ionization modes are available for detailed neutral radical studies, for analysis of both electro-positive and electro-negative plasma radicals.
The EQP system is now available with integrated MCS – multi channel scalar data acquisition with time resolution to 50 nano seconds providing for fast data acquisition in pulsed plasma applications.