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HPR 30, Process and residual gas analysis

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(Made by  Hiden Analytical Ltd., UK)
The HPR-30 sampling system configuration is for fast response high sensitivity analysis of gas and vapour species in vacuum processes.It is also directly suited to analysis of high mass species and precursors used in ALD and MOCVD applications.
The HPR-30 system features a close-coupled re-entrant aperture for sampling directly within the process region, providing maximum data integrity and fast confirmation of process status. Options include the innovative Hiden 3F series triple filter quadrupole system providing enhanced abun dance sensitivity, part-per-billion (ppb) detection levels and high contamination resistance, particularly suited to the analysis of aggressive gases in CVD and RIE applications.

  • Triple filter mass spectrometer
  • Mass range options 200, 300, 500 or 1000 amu
  • Enhanced abundance sensitivity
  • Detection to 5 ppb
  • APSI-MS soft ionisation mode

+ Freeze drying
+ Vacuum analysis for vacuum processing

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